N. I. Chkhalo, A. A. Akhsakhalyan, Yu. A. Vainer, M. V. Zorina, A. E. Pestov, M. V. Svechnikov, M. N. Toropov, N. Kumar, Yu. M. Tokunov, “Application of cerium oxide nanopowders for silicon polishing”, Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021), 1588–1596
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