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Publications in Math-Net.Ru |
Citations |
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2023 |
| 1. |
V. V. Emelyanov, A. N. Kupo, V. A. Emelyanov, “Phenomenological model of metal coating etching in a gas mixtured plasma”, PFMT, 2023, no. 4(57), 69–73  |
| 2. |
A. S. Rudenkov, D. G. Piliptsou, A. N. Kupo, S. A. Frolov, “Structure and mechanical properties of carbon coatings doped with zirconium and silicon”, PFMT, 2023, no. 4(57), 42–47 |
| 3. |
A. N. Kupo, V. V. Emelyanov, V. A. Emelyanov, “Modeling of ir radiation influence on the phase composition of silicon dioxide coatings”, PFMT, 2023, no. 3(56), 64–68 |
| 4. |
V. V. Emelyanov, A. N. Kupo, V. A. Emelyanov, “Modeling of plasma-chemical etching of silicon nitride functional layer on silicon dioxide sublayer in microelectronics technologies”, PFMT, 2023, no. 3(56), 60–63 |
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2022 |
| 5. |
A. S. Rudenkov, A. V. Rogachev, S. M. Zavadski, A. N. Kupo, “Structure and mechanical properties of silicon-carbon coatings alloyed with chromium”, PFMT, 2022, no. 2(51), 52–57 |
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2020 |
| 6. |
A. S. Rudenkov, M. A. Yarmolenko, A. N. Kupo, “Influence of ion-plasma nitrogen on the structure of composite coatings based on cellulose and carbon nanotubes”, PFMT, 2020, no. 4(45), 62–67 |
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