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Zhurnal Vychislitel'noi Matematiki i Matematicheskoi Fiziki, 2021, Volume 61, Number 9, Pages 1528–1535
DOI: https://doi.org/10.31857/S004446692109012X (Mi zvmmf11292) 		 
This article is cited in 6 scientific papers (total in 6 papers)

Mathematical physics

Comparative analysis of algorithms for solving inverse problems related to monochromatic monitoring the deposition of multilayer optical coatings

I. V. Kochikova, Yu. S. Lagutinbc, A. A. Lagutinabc, D. V. Lukyanenkobc, A. V. Tikhonravovab, S. A. Sharapovaab, A. G. Yagolac

a Research Computing Center, Lomonosov Moscow State University, 119234, Moscow, Russia
b Moscow Center for Fundamental and Applied Mathematics, 119234, Moscow, Russia
c Department of Physics, Lomonosov Moscow State University, 119991, Moscow, Russia
Citations (6)
DOI: https://doi.org/10.31857/S004446692109012X
Abstract: The paper presents a comparative analysis of three fundamentally different algorithms for solving inverse problems of monitoring the layer thicknesses of optical coatings based on the data of monochromatic measurements of the reflection/transmission coefficients during deposition process. The previously developed geometric approach to the study of the thickness error correlation of deposited coatings is extended to the case of monochromatic measurements. A new parameter called the self-compensation factor was introduced to estimate the effect of error self-compensation. Its role in assessing the prospects for using various algorithms for coating deposition monitoring is shown.
Key words: inverse problems, algorithms, optical coatings, monochromatic monitoring, error correlation, error self-compensation.
Funding agency Grant number
Russian Science Foundation 16-11-10219
This work was supported by Russian Science Foundation, project no. 16-11-10219.
Received: 05.11.2020
Revised: 05.11.2020
Accepted: 11.02.2021
English version:
Computational Mathematics and Mathematical Physics, 2021, Volume 61, Issue 9, Pages 1504–1510
DOI: https://doi.org/10.1134/S0965542521090116
Bibliographic databases:
Document Type: Article
UDC: 519.635
Language: Russian
Citation: I. V. Kochikov, Yu. S. Lagutin, A. A. Lagutina, D. V. Lukyanenko, A. V. Tikhonravov, S. A. Sharapova, A. G. Yagola, “Comparative analysis of algorithms for solving inverse problems related to monochromatic monitoring the deposition of multilayer optical coatings”, Zh. Vychisl. Mat. Mat. Fiz., 61:9 (2021), 1528–1535; Comput. Math. Math. Phys., 61:9 (2021), 1504–1510
Citation in format AMSBIB
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\by I.~V.~Kochikov, Yu.~S.~Lagutin, A.~A.~Lagutina, D.~V.~Lukyanenko, A.~V.~Tikhonravov, S.~A.~Sharapova, A.~G.~Yagola
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\jour Zh. Vychisl. Mat. Mat. Fiz.
\yr 2021
\vol 61
\issue 9
\pages 1528--1535
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\crossref{https://doi.org/10.31857/S004446692109012X}
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\jour Comput. Math. Math. Phys.
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    • This publication is cited in the following 6 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Журнал вычислительной математики и математической физики Computational Mathematics and Mathematical Physics
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