Zhurnal Vychislitel'noi Matematiki i Matematicheskoi Fiziki
RUS  ENG    JOURNALS   PEOPLE   ORGANISATIONS   CONFERENCES   SEMINARS   VIDEO LIBRARY   PACKAGE AMSBIB  
General information
Latest issue
Archive
Impact factor

Search papers
Search references

RSS
Latest issue
Current issues
Archive issues
What is RSS


Zh. Vychisl. Mat. Mat. Fiz.:
Year:
Volume:
Issue:
Page:
Find




Personal entry:
Login:
Password:
Save password
Enter
Forgotten password?
Register

Zhurnal Vychislitel'noi Matematiki i Matematicheskoi Fiziki, 2020, Volume 60, Number 12, Pages 2122–2130
DOI: https://doi.org/10.31857/S0044466920120066 (Mi zvmmf11175) 		 
This article is cited in 6 scientific papers (total in 6 papers)

Mathematical physics

Stable method for optical monitoring the deposition of multilayer optical coatings

I. V. Kochikova, Yu. S. Lagutinbc, A. A. Lagutinabc, D. V. Lukyanenkobc, A. V. Tikhonravovac, A. G. Yagolab

a Research Computing Center, Lomonosov Moscow State University, Moscow, 119234 Russia
b Faculty of Physics, Lomonosov Moscow State University, Moscow, 119991 Russia
c Moscow Center of Fundamental and Applied Mathematics, Lomonosov Moscow State University, Moscow, 119234 Russia
Citations (6)
References:
PDF
HTML
DOI: https://doi.org/10.31857/S0044466920120066
Abstract: For optical monitoring of layer thickness in the deposition of multilayer optical coatings, a stable method is proposed that completely eliminates the cumulative effect of errors in the thicknesses of deposited layers. The considered monitoring method relies on a nonlocal algorithm for analyzing data measured in the course of coating deposition monitoring. Computer simulation of coating deposition is used to demonstrate the effectiveness of the proposed type of monitoring as compared with other optical monitoring methods.
Key words: multilayer coatings, monochromatic optical monitoring, numerical algorithms, analysis of experimental data.
Funding agency Grant number
Russian Science Foundation 16-11-10219
This work was supported by the Russian Science Foundation, project no. 16-11-10219.
Received: 03.06.2020
Revised: 03.06.2020
Accepted: 04.08.2020
English version:
Computational Mathematics and Mathematical Physics, 2020, Volume 60, Issue 12, Pages 2056–2063
DOI: https://doi.org/10.1134/S0965542520120064
Bibliographic databases:
Document Type: Article
UDC: 519.6
Language: Russian
Citation: I. V. Kochikov, Yu. S. Lagutin, A. A. Lagutina, D. V. Lukyanenko, A. V. Tikhonravov, A. G. Yagola, “Stable method for optical monitoring the deposition of multilayer optical coatings”, Zh. Vychisl. Mat. Mat. Fiz., 60:12 (2020), 2122–2130; Comput. Math. Math. Phys., 60:12 (2020), 2056–2063
Citation in format AMSBIB
\Bibitem{KocLagLag20}
\by I.~V.~Kochikov, Yu.~S.~Lagutin, A.~A.~Lagutina, D.~V.~Lukyanenko, A.~V.~Tikhonravov, A.~G.~Yagola
\paper Stable method for optical monitoring the deposition of multilayer optical coatings
\jour Zh. Vychisl. Mat. Mat. Fiz.
\yr 2020
\vol 60
\issue 12
\pages 2122--2130
\mathnet{http://mi.mathnet.ru/zvmmf11175}
\crossref{https://doi.org/10.31857/S0044466920120066}
\elib{https://elibrary.ru/item.asp?id=44154329}
\transl
\jour Comput. Math. Math. Phys.
\yr 2020
\vol 60
\issue 12
\pages 2056--2063
\crossref{https://doi.org/10.1134/S0965542520120064}
\isi{https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=Publons&SrcAuth=Publons_CEL&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000604980400008}
\scopus{https://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-85098550482}
Linking options:
  • https://www.mathnet.ru/eng/zvmmf11175
  • https://www.mathnet.ru/eng/zvmmf/v60/i12/p2122
    • This publication is cited in the following 6 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Журнал вычислительной математики и математической физики Computational Mathematics and Mathematical Physics
    Statistics & downloads:
    Abstract page:126
    References:6
     
      Contact us:
    		  Terms of Use  Registration to the website  Logotypes © Steklov Mathematical Institute RAS, 2024