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Zhurnal Vychislitel'noi Matematiki i Matematicheskoi Fiziki, 2020, Volume 60, Number 6, Pages 1045–1052
DOI: https://doi.org/10.31857/S0044466920060058 (Mi zvmmf11094) 		 
Computational approach to the investigation of the error self-compensation effect in the deposition of multilayer optical coatings

I. V. Kochikova, A. V. Tikhonravova, A. G. Yagolab

a Research Computing Center, Lomonosov Moscow State University, Moscow, 119234 Russia
b Faculty of Physics, Lomonosov Moscow State University, Moscow, 119991 Russia
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DOI: https://doi.org/10.31857/S0044466920060058
Abstract: A new computational approach is developed to evaluate the strength of the error self-compensation effect in the case of broadband optical monitoring of the multilayer coating deposition process. A new form of estimating the strength of the error self-compensation effect is suggested. Computational experiments simulating the deposition process are used to study the presence of the self-compensation effect and it is shown that the assessment of two parameters characterizing the degree of error correlation and the strength of the self-compensation effect is sufficient from a practical point of view.
Key words: inverse problems, optical coatings, broadband optical monitoring, error correlation.
Funding agency Grant number
Russian Science Foundation 16-11-10219
This work was supported by RSF, project no. 16-11-10219.
Received: 24.10.2019
Revised: 24.10.2019
Accepted: 11.02.2020
English version:
Computational Mathematics and Mathematical Physics, 2020, Volume 60, Issue 6, Pages 1017–1024
DOI: https://doi.org/10.1134/S0965542520060056
Bibliographic databases:
Document Type: Article
UDC: 519.6
Language: Russian
Citation: I. V. Kochikov, A. V. Tikhonravov, A. G. Yagola, “Computational approach to the investigation of the error self-compensation effect in the deposition of multilayer optical coatings”, Zh. Vychisl. Mat. Mat. Fiz., 60:6 (2020), 1045–1052; Comput. Math. Math. Phys., 60:6 (2020), 1017–1024
Citation in format AMSBIB
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\paper Computational approach to the investigation of the error self-compensation effect in the deposition of multilayer optical coatings
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