Mathematical Physics and Computer Simulation
RUS  ENG    JOURNALS   PEOPLE   ORGANISATIONS   CONFERENCES   SEMINARS   VIDEO LIBRARY   PACKAGE AMSBIB  
General information
Latest issue
Archive

Search papers
Search references

RSS
Latest issue
Current issues
Archive issues
What is RSS



Mathematical Physics and Computer Simulation:
Year:
Volume:
Issue:
Page:
Find






Personal entry:
Login:
Password:
Save password
Enter
Forgotten password?
Register


Mathematical Physics and Computer Simulation, 2017, Volume 20, Issue 4, Pages 83–94
DOI: https://doi.org/10.15688/mpcm.jvolsu.2017.4.8
(Mi vvgum199)
 

This article is cited in 1 scientific paper (total in 1 paper)

Physics

Evaluation of the possibility of applying the method of the laser triangulation to measurement of thin film thickness

A. A. Adamov, V. N. Khramov

Volgograd State University
Full-text PDF (803 kB) Citations (1)
References:
Abstract: In this article the problem of measuring the thickness of thin films by laser triangulation is studied. An expression relating to the value of the film thickness and the coordinates of the rays on the photodetector is obtained. Experimental demonstration of the possibility of using this method to measure the thickness in the range [0.1, 1] mm is proposed. The results can be used in ophthalmology for the rapid diagnosis during operations in the stratum corneum. Model human cornea is a thin transparent film on the water. Camera with CCD matrix is used as photodetector.
The authors estimate of the minimum possible for film thickness, which can be measured in this experiment. The numerical value of it is in the vicinity of 0.1 mm. The smallest thickness value obtained in the experiment for a given method and parameter setting data is 0.23 mm. This method can also be used for thicknesses <0.23 mm by using a short-wave radiation and a corresponding receiver.
Keywords: laser triangulation, thickness, thin film, CCD matrix, index of refraction, measurement error.
Document Type: Article
UDC: 53.082.531, 53.082.532
BBC: 22.343
Language: Russian
Citation: A. A. Adamov, V. N. Khramov, “Evaluation of the possibility of applying the method of the laser triangulation to measurement of thin film thickness”, Mathematical Physics and Computer Simulation, 20:4 (2017), 83–94
Citation in format AMSBIB
\Bibitem{AdaKhr17}
\by A.~A.~Adamov, V.~N.~Khramov
\paper Evaluation of the possibility of applying the method of the laser triangulation to measurement of thin film thickness
\jour Mathematical Physics and Computer Simulation
\yr 2017
\vol 20
\issue 4
\pages 83--94
\mathnet{http://mi.mathnet.ru/vvgum199}
\crossref{https://doi.org/10.15688/mpcm.jvolsu.2017.4.8}
Linking options:
  • https://www.mathnet.ru/eng/vvgum199
  • https://www.mathnet.ru/eng/vvgum/v20/i4/p83
  • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Mathematical Physics and Computer Simulation
    Statistics & downloads:
    Abstract page:172
    Full-text PDF :75
    References:26
     
      Contact us:
     Terms of Use  Registration to the website  Logotypes © Steklov Mathematical Institute RAS, 2024