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Vestnik Tomskogo Gosudarstvennogo Universiteta. Matematika i Mekhanika, 2023, Number 85, Pages 43–57
DOI: https://doi.org/10.17223/19988621/85/4
(Mi vtgu1028)
 

MECHANICS

A study of jet formation during the sputtering of electrodes in an arc discharge for the different currents

V. A. Andryushchenko, E. V. Boyko, S. Z. Sakhapov, M. S. Skirda, D. V. Smovzh

Kutateladze Institute of Thermophysics of the Siberian Branch of RAS, Novosibirsk, Russian Federation
References:
Abstract: This work is devoted to experimental and theoretical studies of the sputtering of electrodes in an arc discharge. The temperature distribution in the working chamber during arc discharge is analyzed depending on the discharge current. On the basis of experimental data on the anode sublimation and interelectrode distance, a fan jet is simulated, which is generated during the anode sputtering in an arc discharge. The calculation is carried out using the model describing the processes occurring in the arc plasma, jet propagation, transport of particles by the jet and their ionization. The numerical simulation results for the radial temperature distribution are consistent with the experimental data. The experiments show that an increase in the discharge current leads to an increase in the concentration of fullerenes and graphite structures in the soot. Based on the simulation data, it is shown that this effect is a result of the longer residence time of growing carbon particles in a high-temperature zone (1000-2800 K) at high arc discharge currents.
Keywords: arc discharge, sputtering, graphite structures, carbon materials.
Funding agency Grant number
Ministry of Science and Higher Education of the Russian Federation 122022800487-2
Russian Science Foundation 18-19-00213П
Manufacturing of an arc discharge installation, the synthesis of materials, the measurements by TGA, TEM, XRF, and the numerical modeling were supported by the Russian Science Foundation (project No. 18-19-00213П). Optical measurements were carried out with the support of the budget project IT SB RAS (No. 122022800487-2).
Received: 28.06.2022
Accepted: October 10, 2023
Document Type: Article
UDC: 537.525.5
Language: Russian
Citation: V. A. Andryushchenko, E. V. Boyko, S. Z. Sakhapov, M. S. Skirda, D. V. Smovzh, “A study of jet formation during the sputtering of electrodes in an arc discharge for the different currents”, Vestn. Tomsk. Gos. Univ. Mat. Mekh., 2023, no. 85, 43–57
Citation in format AMSBIB
\Bibitem{AndBoiSak23}
\by V.~A.~Andryushchenko, E.~V.~Boyko, S.~Z.~Sakhapov, M.~S.~Skirda, D.~V.~Smovzh
\paper A study of jet formation during the sputtering of electrodes in an arc discharge for the different currents
\jour Vestn. Tomsk. Gos. Univ. Mat. Mekh.
\yr 2023
\issue 85
\pages 43--57
\mathnet{http://mi.mathnet.ru/vtgu1028}
\crossref{https://doi.org/10.17223/19988621/85/4}
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    Вестник Томского государственного университета. Математика и механика
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