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Vestnik SamGU. Estestvenno-Nauchnaya Ser., 2011, Issue 2(83), Pages 179–183 (Mi vsgu60)  
This article is cited in 1 scientific paper (total in 1 paper)

Physics

Peculiarities of nanopoint damage process in the structure of por-SiC/Si, obtained by diffusion technology for chemical sensors

V. I. Chepurnova, K. P. Sivakovaa, A. A. Ermoshkinb

a Dept. of Solid State Electronics and Nano Technology, Samara State University, Samara, 443011, Russian Federation
b Dept. of of Metallurgy, Powder Metallurgy, Samara State Technical University, Samara, 443100, Russian Federation
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Abstract: Heteroepitaxy supported silicon carbide films as a perspective material for high-temperature electronics is considered. In the paper the analysis of the point damage process in homogeneous $\beta$-$SiC$ phase based on silicon matrix and gas phase hydrocarbons at 1360–1380$\,^\circ\!$C temperature range and dopant of Ga under normal pressure is given.
Keywords: nano point defect formation, solid-state chemical gas sensor, por-SiC/Si, diffusion technology.
Received: 18.11.2010
Revised: 18.11.2010
Document Type: Article
UDC: 621.382
Language: Russian
Citation: V. I. Chepurnov, K. P. Sivakova, A. A. Ermoshkin, “Peculiarities of nanopoint damage process in the structure of por-SiC/Si, obtained by diffusion technology for chemical sensors”, Vestnik Samarskogo Gosudarstvennogo Universiteta. Estestvenno-Nauchnaya Seriya, 2011, no. 2(83), 179–183
Citation in format AMSBIB
\Bibitem{CheSivErm11}
\by V.~I.~Chepurnov, K.~P.~Sivakova, A.~A.~Ermoshkin
\paper Peculiarities of nanopoint damage process in the structure of \emph{por-SiC/Si}, obtained by diffusion technology for chemical sensors
\jour Vestnik Samarskogo Gosudarstvennogo Universiteta. Estestvenno-Nauchnaya Seriya
\yr 2011
\issue 2(83)
\pages 179--183
\mathnet{http://mi.mathnet.ru/vsgu60}
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    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Вестник Самарского государственного университета. Естественнонаучная серия
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