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Numerical methods and programming, 2001, Volume 2, Issue 1, Pages 12–26 (Mi vmp764)  
This article is cited in 1 scientific paper (total in 1 paper)

Numerical modeling and computer algorithm for the process of segregation of alloy impurities at the boundary of an oxidation wave in semiconductor substrates

G. A. Tarnavskiia, S. I. Shpaka, M. S. Obrechtb

a Khristianovich Institute of Theoretical and Applied Mechanics, Siberian Branch of the Russian Academy of Sciences, Novosibirsk
b University of Waterloo, Canada
Full-text PDF (741 kB) Citations (1)
Abstract: An approach to the approximate modeling of complex physico-chemical processes of segregation of alloy impurities implanted in a base material is considered for the case when an oxidation wave propagates along it. A computer algorithm that realizes this approach is given. Numerical results obtained for the segregation of boron, arsenic, phosphorus, and antimony in silicon at the boundary “silicon/silicon dioxide” are discussed.
Keywords: processes of segregation, oxidation waves, alloy impurities, numerical simulation, physico-chemical processes.
UDC: 519.2:541.1
Language: Russian
Citation: G. A. Tarnavskii, S. I. Shpak, M. S. Obrecht, “Numerical modeling and computer algorithm for the process of segregation of alloy impurities at the boundary of an oxidation wave in semiconductor substrates”, Num. Meth. Prog., 2:1 (2001), 12–26
Citation in format AMSBIB
\Bibitem{TarShpObr01}
\by G.~A.~Tarnavskii, S.~I.~Shpak, M.~S.~Obrecht
\paper Numerical modeling and computer algorithm for the process of segregation of alloy impurities at the boundary of an
oxidation wave in semiconductor substrates
\jour Num. Meth. Prog.
\yr 2001
\vol 2
\issue 1
\pages 12--26
\mathnet{http://mi.mathnet.ru/vmp764}
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  • https://www.mathnet.ru/eng/vmp/v2/i1/p12
    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Numerical methods and programming
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