Simulation of Volume Treatment Mechanism of Capillary-porous Materials in Low Pressure Radiofrequency Plasmas

Physical effect of volumetric modification of capillary-porous materials in low pressure RF plasmas is simulated. As it can be concluded from calculations, non-self-maintained discharge may be a reason of volumetric modification. This discharge appears in porous volume in a series of electron and ion emission from nanopore surfaces. Transmission of kinetic energy and recombination of charged particles on nanopore surfaces leads to a change of surface properties. That is interpreted as volumetric modification of capillary-porous materials.