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Kazanskii Gosudarstvennyi Universitet. Uchenye Zapiski. Seriya Fiziko-Matematichaskie Nauki, 2008, Volume 150, Book 3, Pages 67–72 (Mi uzku687)  
Three-dimensional Structure of Electromagnetic Fields in an Inductively Coupled Plasma.

M. V. Morozov, A. E. Staroverov, A. Kh. Gil'mutdinov, M. Kh. Salahov

Kazan State University
Full-text PDF (800 kB)
Abstract: A new method for calculating three-dimensional structure of electromagnetic fields in inductively coupled plasma is developed. The method is based on Fourier expansion of electromagnetic fields and plasma conductivity to polar harmonics. A temporal dynamics of three-dimensional spatial structure of electromagnetic fields in the inductively coupled plasma and spatial distribution of energy fluxes into plasma are calculated. Asymmetrical shape of the inductor is shown to result in significant asymmetry of electromagnetic fields in inductively coupled plasma.
Keywords: inductively coupled plasma, numerical methods, electromagnetic fields, vector potential, Fourier expansion.
Received: 26.06.2008
UDC: 537.523.9
Language: Russian
Citation: M. V. Morozov, A. E. Staroverov, A. Kh. Gil'mutdinov, M. Kh. Salahov, “Three-dimensional Structure of Electromagnetic Fields in an Inductively Coupled Plasma.”, Kazan. Gos. Univ. Uchen. Zap. Ser. Fiz.-Mat. Nauki, 150, no. 3, Kazan University, Kazan, 2008, 67–72
Citation in format AMSBIB
\Bibitem{MorStaGil08}
\by M.~V.~Morozov, A.~E.~Staroverov, A.~Kh.~Gil'mutdinov, M.~Kh.~Salahov
\paper Three-dimensional Structure of Electromagnetic Fields in an Inductively Coupled Plasma.
\serial Kazan. Gos. Univ. Uchen. Zap. Ser. Fiz.-Mat. Nauki
\yr 2008
\vol 150
\issue 3
\pages 67--72
\publ Kazan University
\publaddr Kazan
\mathnet{http://mi.mathnet.ru/uzku687}
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    		Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki
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