Numerical simulation of the high-frequency capacitive discharge

The nonlinear problem of determining the interaction parameters between the high-frequency capacitive discharge and the sample placed on a substrate in the local approximation is considered. The problem is described by a system of nonlinear initial-value problems. A numerical method for solving this problem is suggested. The results of numerical experiments for the model problem are given. Comparative analysis of these results with the characteristics of the high-frequency capacitive discharge without the sample is carried out.