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Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki, 2014, Volume 156, Book 4, Pages 120–132
(Mi uzku1285)
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This article is cited in 5 scientific papers (total in 5 papers)
Two-dimensional model of a non-equilibrium strongly non-uniform microwave discharge in a DC external field
Yu. A. Lebedev, A. V. Tatarinov, A. Yu. Titov, I. L. Epstein Topchiev Institute of Petrochemical Synthesis, Russian Academy of Sciences, Moscow, Russia
Abstract:
A self-consistent model of a non-equilibrium strongly inhomogeneous microwave discharge is described. The model is based on the simultaneous solution of the Maxwell equations, Poisson equation, Boltzmann equation for free plasma electrons, and the equations describing the vibrational kinetics and the kinetics of excited and charged particles in hydrogen plasma. The results of the first calculations are presented, which are in qualitative agreement with the experimental data.
Keywords:
microwave plasma, discharge in hydrogen, self-consistent modeling, non-equilibrium plasma.
Received: 26.08.2014
Citation:
Yu. A. Lebedev, A. V. Tatarinov, A. Yu. Titov, I. L. Epstein, “Two-dimensional model of a non-equilibrium strongly non-uniform microwave discharge in a DC external field”, Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki, 156, no. 4, Kazan University, Kazan, 2014, 120–132
Linking options:
https://www.mathnet.ru/eng/uzku1285 https://www.mathnet.ru/eng/uzku/v156/i4/p120
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