Calculation of gas dynamics of streams of a radio-frequency plasma at low pressure

This work describes a model of the RF plasma flow in a transient mode at a pressure of $P=13.3$–$133$ Pa with a Knudsen number in a range of $8\cdot10^{-3}\leq\mathrm{Kn}\leq7\cdot10^{-2}$. The model is built using the statistical approach. The results of calculations of the plasma neutral component flow in an undisturbed stream and at specimen circumfluence are presented.