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Proceedings of the Yerevan State University, series Physical and Mathematical Sciences, 2010, Issue 3, Pages 63–67 (Mi uzeru227)  
Physics

Method for measuring thickness of thin objects with a nanometer resolution, based on the single-layer flat-coil-oscillator method

S. G. Gevorgyanab, S. T. Muradyanca, M. H. Azaryana, G. H. Karapetyanab

a Center on Superconductivity and Scientific Instrumentation, Chair of Solid State Physics YSU, Armenia
b Institute for Physical Research, Nat. Academy of Sci., Armenia
c Russian-Armenian (Slavonic) State University, Yerevan
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Abstract: A method for measuring of any composition films and tapes thickness with a nanometer resolution is suggested and validated experimentally. That operates on the base of a single-layer flat-coil-oscillator technique. A laboratory prototype of a device is designed and created, based on this method. Besides, PC operation in a "NI LabVIEW" software environment, as well as preliminary tests and calibration of the created device is implemented. It may find variety of applications in a research and in high-tech technology.
Keywords: single-layer Flat-Coil-Oscillator method, a nanometer resolution thickness measuring and controlling technique, high-$T_c$ superconductive films and tapes.
Funding agency Grant number
Armenian National Foundation of Science $\&$ Advanced Technologies, U.S. Civilian Research $\&$ Development Foundation, R$\&$D project #ISIPA 01-04, #ARP2-3229-YE-04, #UCEP 07/07, #72-103
This study was supported by the Armenian National Foundation of Science $\&$ Advanced Technologies and U.S. Civilian Research $\&$ Development Foundation under Grants #ISIPA 01-04, #ARP2-3229-YE-04 and #UCEP 07/07. The study was supported also by state sources of Armenia in frames of the R$\&$D project #72-103
Received: 16.09.2010
Accepted: 11.10.2010
Document Type: Article
Language: English
Citation: S. G. Gevorgyan, S. T. Muradyan, M. H. Azaryan, G. H. Karapetyan, “Method for measuring thickness of thin objects with a nanometer resolution, based on the single-layer flat-coil-oscillator method”, Proceedings of the YSU, Physical and Mathematical Sciences, 2010, no. 3, 63–67
Citation in format AMSBIB
\Bibitem{GevMurAza10}
\by S.~G.~Gevorgyan, S.~T.~Muradyan, M.~H.~Azaryan, G.~H.~Karapetyan
\paper Method for measuring thickness of thin objects with a nanometer resolution, based on the single-layer flat-coil-oscillator method
\jour Proceedings of the YSU, Physical and Mathematical Sciences
\yr 2010
\issue 3
\pages 63--67
\mathnet{http://mi.mathnet.ru/uzeru227}
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