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Uspekhi Fizicheskikh Nauk, 1979, Volume 128, Number 1, Pages 180–181
DOI: https://doi.org/10.3367/UFNr.0128.197905i.0180
(Mi ufn9330)
 

This article is cited in 1 scientific paper (total in 1 paper)

MEETINGS AND CONFERENCES

X-ray lithography in synchrotron radiation beams

Yu. M. Aleksandrov, A. D. Krivospitskiy, M. N. Yakimenko
Full-text PDF (407 kB) Citations (1)
English version:
Physics–Uspekhi, 1979, Volume 22, Issue 5, Pages 383–384
DOI: https://doi.org/10.1070/PU1979v022n05ABEH005503
Document Type: Article
UDC: 539.122.2 (048)
PACS: 01.10.Fv
Language: Russian
Citation: Yu. M. Aleksandrov, A. D. Krivospitskiy, M. N. Yakimenko, “X-ray lithography in synchrotron radiation beams”, UFN, 128:1 (1979), 180–181; Phys. Usp., 22:5 (1979), 383–384
Citation in format AMSBIB
\Bibitem{AleKriYak79}
\by Yu.~M.~Aleksandrov, A.~D.~Krivospitskiy, M.~N.~Yakimenko
\paper X-ray lithography in synchrotron radiation beams
\jour UFN
\yr 1979
\vol 128
\issue 1
\pages 180--181
\mathnet{http://mi.mathnet.ru/ufn9330}
\crossref{https://doi.org/10.3367/UFNr.0128.197905i.0180}
\transl
\jour Phys. Usp.
\yr 1979
\vol 22
\issue 5
\pages 383--384
\crossref{https://doi.org/10.1070/PU1979v022n05ABEH005503}
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  • https://www.mathnet.ru/eng/ufn/v128/i1/p180
    CONFERENCES AND SYMPOSIA
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