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Uspekhi Fizicheskikh Nauk, 1983, Volume 140, Number 4, Pages 737–738
DOI: https://doi.org/10.3367/UFNr.0140.198308l.0737 (Mi ufn8695) 		 
BIBLIOGRAPHY

Ion implantation techniques

V. S. Vavilov
Full-text PDF (206 kB)
DOI: https://doi.org/10.3367/UFNr.0140.198308l.0737
Document Type: Critic, bibliography
UDC: 537.311.33(049.3)
Language: Russian
Citation: V. S. Vavilov, “Ion implantation techniques”, UFN, 140:4 (1983), 737–738
Citation in format AMSBIB
\Bibitem{Vav83}
\by V.~S.~Vavilov
\paper Ion implantation techniques
\jour UFN
\yr 1983
\vol 140
\issue 4
\pages 737--738
\mathnet{http://mi.mathnet.ru/ufn8695}
\crossref{https://doi.org/10.3367/UFNr.0140.198308l.0737}
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