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Uspekhi Fizicheskikh Nauk, 1983, Volume 139, Number 1, Pages 165–168
DOI: https://doi.org/10.3367/UFNr.0139.198301f.0165
(Mi ufn8590)
 

This article is cited in 6 scientific papers (total in 6 papers)

METHODOLOGICAL NOTES

Color-coded display of information in scanning electron microscopy

G. V. Spivak, E. I. Rau, A. Yu. Sasov

Lomonosov Moscow State University
Full-text PDF (886 kB) Citations (6)
Abstract: This article describes a system for color-coding of images for qualitative and quantitative analysis of information in the scanning electron microscope. The method is based on an “intensity-color” conversion, which matches a certain color with a certain parameter or property of the object. The video signal is quantized with respect to the color spectrum in the secondary-electron-emission, back-scattered-electron, elemental-analysis, potential-contrast, and induced-current modes in studying semiconductor structures. The potentialities of color-coding of the video signal are demonstrated experimentally in fast quality control of microelectronic parts and in determining the local distribution of chemical elements in materials under study.
English version:
Physics–Uspekhi, 1983, Volume 26, Issue 1, Pages 84–86
DOI: https://doi.org/10.1070/PU1983v026n01ABEH004309
Document Type: Article
UDC: 621.385.833
PACS: 07.80.+x
Language: Russian
Citation: G. V. Spivak, E. I. Rau, A. Yu. Sasov, “Color-coded display of information in scanning electron microscopy”, UFN, 139:1 (1983), 165–168; Phys. Usp., 26:1 (1983), 84–86
Citation in format AMSBIB
\Bibitem{SpiRauSas83}
\by G.~V.~Spivak, E.~I.~Rau, A.~Yu.~Sasov
\paper Color-coded display of information in scanning electron microscopy
\jour UFN
\yr 1983
\vol 139
\issue 1
\pages 165--168
\mathnet{http://mi.mathnet.ru/ufn8590}
\crossref{https://doi.org/10.3367/UFNr.0139.198301f.0165}
\transl
\jour Phys. Usp.
\yr 1983
\vol 26
\issue 1
\pages 84--86
\crossref{https://doi.org/10.1070/PU1983v026n01ABEH004309}
Linking options:
  • https://www.mathnet.ru/eng/ufn8590
  • https://www.mathnet.ru/eng/ufn/v139/i1/p165
  • This publication is cited in the following 6 articles:
    1. Principles of Electron Optics, 2018, 1297  crossref
    2. K.S. SIM, C.P. TSO, H.Y. TING, “Canny optimization technique for electron microscope image colourization”, Journal of Microscopy, 232:2 (2008), 313  crossref
    3. Principles of Electron Optics, 1996, 1103  crossref
    4. Principles of Electron Optics, 1989, 1103  crossref
    5. G. V. Saparin, S. K. Obyden, “Colour display of video information in scanning electron microscopy: Principles and applications to physics, geology, soil science, biology, and medicine”, Scanning, 10:3 (1988), 87  crossref
    6. G. V. Spivak, V. I. Petrov, M. K. Antoshin, “Local cathodoluminescence and its capabilities for the study of band structure in solids”, Phys. Usp., 29:4 (1986), 364–380  mathnet  mathnet  crossref  crossref
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
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