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This article is cited in 6 scientific papers (total in 6 papers)
METHODOLOGICAL NOTES
Color-coded display of information in scanning electron microscopy
G. V. Spivak, E. I. Rau, A. Yu. Sasov Lomonosov Moscow State University
Abstract:
This article describes a system for color-coding of images for qualitative and quantitative analysis of information in the scanning electron microscope. The method is based on an “intensity-color” conversion, which matches a certain color with a certain parameter or property of the object. The video signal is quantized with respect to the color spectrum in the secondary-electron-emission, back-scattered-electron, elemental-analysis, potential-contrast, and induced-current modes in studying semiconductor structures. The potentialities of color-coding of the video signal are demonstrated experimentally in fast quality control of microelectronic parts and in determining the local distribution of chemical elements in materials under study.
Citation:
G. V. Spivak, E. I. Rau, A. Yu. Sasov, “Color-coded display of information in scanning electron microscopy”, UFN, 139:1 (1983), 165–168; Phys. Usp., 26:1 (1983), 84–86
Linking options:
https://www.mathnet.ru/eng/ufn8590 https://www.mathnet.ru/eng/ufn/v139/i1/p165
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