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Uspekhi Fizicheskikh Nauk, 1984, Volume 143, Number 2, Pages 336–337
DOI: https://doi.org/10.3367/UFNr.0143.198406s.0336 (Mi ufn8502) 		 
BIBLIOGRAPHY

Ion implantation: equipment and techniques

V. S. Vavilov
Full-text PDF (233 kB)
DOI: https://doi.org/10.3367/UFNr.0143.198406s.0336
Document Type: Critic, bibliography
UDC: 537.311.33(049.3)
Language: Russian
Citation: V. S. Vavilov, “Ion implantation: equipment and techniques”, UFN, 143:2 (1984), 336–337
Citation in format AMSBIB
\Bibitem{Vav84}
\by V.~S.~Vavilov
\paper Ion implantation: equipment and techniques
\jour UFN
\yr 1984
\vol 143
\issue 2
\pages 336--337
\mathnet{http://mi.mathnet.ru/ufn8502}
\crossref{https://doi.org/10.3367/UFNr.0143.198406s.0336}
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