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Uspekhi Fizicheskikh Nauk, 1988, Volume 156, Number 3, Pages 513–543
DOI: https://doi.org/10.3367/UFNr.0156.198811d.0513 (Mi ufn7876) 		 
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The velocity distribution of sputtered atoms

M. W. Thompson
Full-text PDF (730 kB)
DOI: https://doi.org/10.3367/UFNr.0156.198811d.0513
Document Type: Article
UDC: 539.188
Language: Russian
Citation: M. W. Thompson, “The velocity distribution of sputtered atoms”, UFN, 156:3 (1988), 513–543; Nucl. Instrum. and Meth. in Phys. Res. Ser. B., 18 (1987), 411–429
Citation in format AMSBIB
\Bibitem{Tho88}
\by M.~W.~Thompson
\paper The velocity distribution of sputtered atoms
\jour UFN
\yr 1988
\vol 156
\issue 3
\pages 513--543
\mathnet{http://mi.mathnet.ru/ufn7876}
\crossref{https://doi.org/10.3367/UFNr.0156.198811d.0513}
\transl
\jour Nucl. Instrum. and Meth. in Phys. Res. Ser. B.
\yr 1987
\vol 18
\pages 411--429
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