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This article is cited in 117 scientific papers (total in 117 papers)
REVIEWS OF TOPICAL PROBLEMS
Inelastic sputtering of solids by ions
I. A. Baranovab, S. O. Tsepelevichab, Yu. V. Martynenkoab, Yu. N. Yavlinskiiab a I. V. Kurchatov Institute of Atomic Energy
b RPA 'V.G. Khlopin Radium Institute', Leningrad
Abstract:
A review is given of both theoretical and experimental investigations of the sputtering as a result of strong excitation of the electron subsystem of a solid by fast and multiply charged ions. A systematic account is given of the main experimentally established relationships governing inelastic sputtering. An analysis is made of the dependences of the inelastic sputtering coefficient on the energy and charge of the incident ions and on the target structure, and of the differential characteristics of the sputtered particles. Theoretical investigations of the electron-excitation region and its relaxation, of the transfer of the electron energy to the target atoms, and of the inelastic sputtering models are discussed. A brief account is given of the history of the topic, of possible practical applications of inelastic sputtering, and of its relationship to other phenomena.
Citation:
I. A. Baranov, S. O. Tsepelevich, Yu. V. Martynenko, Yu. N. Yavlinskii, “Inelastic sputtering of solids by ions”, UFN, 156:3 (1988), 477–511; Phys. Usp., 31:11 (1988), 1015–1034
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https://www.mathnet.ru/eng/ufn7875 https://www.mathnet.ru/eng/ufn/v156/i3/p477
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