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Uspekhi Fizicheskikh Nauk, 2009, Volume 179, Number 3, Pages 243–253
DOI: https://doi.org/10.3367/UFNr.0179.200903b.0243
(Mi ufn733)
 

This article is cited in 6 scientific papers (total in 6 papers)

FROM THE CURRENT LITERATURE

Carbon nanotube electrode systems and methods of their fabrication

A. I. Vorob'eva

Belorussian State University of Informatics and Radioelectronics
References:
Abstract: Techniques for fabricating electrode systems for carbon nanotubes used as nanoelectronic device elements are reviewed. Ways of decreasing the specific resistance of electrodes and contact resistance in metai-nanotube structures are examined. Advances in and prospects for using nanotubes as contacts in future ULSI interconnects are discussed.
Received: July 11, 2008
Revised: September 17, 2008
English version:
Physics–Uspekhi, 2009, Volume 52, Issue 3, Pages 225–234
DOI: https://doi.org/10.3367/UFNe.0179.200903b.0243
Bibliographic databases:
Document Type: Article
PACS: 73.63.Fg, 85.35.Kt, 85.40.-e
Language: Russian
Citation: A. I. Vorob'eva, “Carbon nanotube electrode systems and methods of their fabrication”, UFN, 179:3 (2009), 243–253; Phys. Usp., 52:3 (2009), 225–234
Citation in format AMSBIB
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Linking options:
  • https://www.mathnet.ru/eng/ufn733
  • https://www.mathnet.ru/eng/ufn/v179/i3/p243
  • This publication is cited in the following 6 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Успехи физических наук Physics-Uspekhi
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    Abstract page:365
    Full-text PDF :116
    References:35
    First page:1
     
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