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This article is cited in 6 scientific papers (total in 6 papers)
INSTRUMENTS AND METHODS OF MEASUREMENT
Spectroscopy of small gas components of a nonequilibrium low-temperature plasma
V. N. Ochkin Lebedev Physical Institute, Russian Academy of Sciences, Moscow
Abstract:
The state of the art and prospects for the development of quantitative optical spectroscopy methods for analyzing the composition of small chemically active components of a nonequilibrium plasma are discussed. The capabilities of the methods are considered in combination with the conditions of applicability, both for fundamental research in the fields of plasma physics and chemistry, and for monitoring the technological processes in reactors for the benefit of the energy sector, micro- and nano-electronics, medicine, the creation of optical coatings, and generating active radicals and excited particles.
Received: June 4, 2021 Revised: July 22, 2021 Accepted: July 23, 2021
Citation:
V. N. Ochkin, “Spectroscopy of small gas components of a nonequilibrium low-temperature plasma”, UFN, 192:10 (2022), 1145–1178; Phys. Usp., 65:10 (2022), 1071–1103
Linking options:
https://www.mathnet.ru/eng/ufn7096 https://www.mathnet.ru/eng/ufn/v192/i10/p1145
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Abstract page: | 176 | Full-text PDF : | 28 | References: | 13 | First page: | 9 |
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