Spectroscopy of small gas components of a nonequilibrium low-temperature plasma

The state of the art and prospects for the development of quantitative optical spectroscopy methods for analyzing the composition of small chemically active components of a nonequilibrium plasma are discussed. The capabilities of the methods are considered in combination with the conditions of applicability, both for fundamental research in the fields of plasma physics and chemistry, and for monitoring the technological processes in reactors for the benefit of the energy sector, micro- and nano-electronics, medicine, the creation of optical coatings, and generating active radicals and excited particles.