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Uspekhi Fizicheskikh Nauk, 2020, Volume 190, Number 1, Pages 92–106
DOI: https://doi.org/10.3367/UFNr.2019.05.038623 (Mi ufn6629) 		 
This article is cited in 49 scientific papers (total in 49 papers)

CONFERENCES AND SYMPOSIA

Beryllium-based multilayer X-ray optics

V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, N. I. Chkhalo

Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod
Full-text PDF (1046 kB) Citations (49)
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DOI: https://doi.org/10.3367/UFNr.2019.05.038623
Abstract: The article provides a review of the current state of affairs in the field of physics and technology of multilayer beryllium-containing mirrors intended for projection lithography and solar corona studies in the extreme ultraviolet (EUV) region. The methods of synthesizing and studying beryllium-containing multilayer mirrors are described. The results of recent studies on the internal structure and EUV reflection coefficients are given for Mo/Be, Mo/Si, Be/Al, and Be/Mg multilayer mirrors. The effect of Si and Be interlayers on the reflectivity is explained. Avenues for further research on beryllium-containing mirrors are discussed.
Funding agency Grant number
Ministry of Science and Higher Education of the Russian Federation 0035-2014-0204
Russian Foundation for Basic Research 18-32-00173
19-07-00173
19-02-00081
18-02-173
18-02-00588
17-52-150006
18-42-520007
18-32-00671
This work was performed with the use of equipment from the Physics and Technology of Micro- and Nanostructures Shared Equipment Centre of IPM RAS in the framework of the State Assignment for IPM RAS (project no. 0035-2014-0204) with support from the Russian Foundation for Basic Research (grant nos 19-07-00173, 19-02-00081, 18-02-173, 18-02-00588, 17-52-150006, 18-42-520007, 18-32-00671, and 18-32-00173).
Received: July 18, 2019
Accepted: May 22, 2019
English version:
Physics–Uspekhi, 2020, Volume 63, Issue 1, Pages 83–95
DOI: https://doi.org/10.3367/UFNe.2019.05.038623
Bibliographic databases:
Document Type: Article
PACS: 07.60.-j, 07.85.Fv, 42.79.-e, 68.35.Ct, 68.35.Fx, 68.47.De, 68.55.A-, 68.65.Ac, 81.15.-z
Language: Russian
Citation: V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, N. I. Chkhalo, “Beryllium-based multilayer X-ray optics”, UFN, 190:1 (2020), 92–106; Phys. Usp., 63:1 (2020), 83–95
Citation in format AMSBIB
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    CONFERENCES AND SYMPOSIA
    This publication is cited in the following 49 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
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