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This article is cited in 32 scientific papers (total in 32 papers)
INSTRUMENTS AND METHODS OF INVESTIGATION
3D printing methods for micro- and nanostructures
K. Fritzler, V. Ya. Prinz Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk
Abstract:
The physical and physicochemical fundamentals of three-dimensional (3D) micro- and nanoprinting are presented. 3D printing (or additive manufacturing technology) is a process which fabricates structures and devices by depositing material (usually layer by layer) according to a 3D digital model. The methods and results reviewed here are limited to those from micro- and nanoscale fields, which are in demand in the fields of electronics, photonics, and bionics. Special attention is given to methods for fabricating sub-100-nm structures, including single- and two-photon polymerization stereolithography, electrohydrodynamic inkjet printing, and laser-induced forward transfer. The advantages and disadvantages of 3D printing methods are discussed, together with prospects for their development and application.
Received: June 5, 2017 Accepted: November 10, 2017
Citation:
K. Fritzler, V. Ya. Prinz, “3D printing methods for micro- and nanostructures”, UFN, 189:1 (2019), 55–71; Phys. Usp., 62:1 (2019), 54–69
Linking options:
https://www.mathnet.ru/eng/ufn6054 https://www.mathnet.ru/eng/ufn/v189/i1/p55
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Abstract page: | 341 | Full-text PDF : | 47 | References: | 37 | First page: | 11 |
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