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Uspekhi Fizicheskikh Nauk, 2019, Volume 189, Number 1, Pages 55–71
DOI: https://doi.org/10.3367/UFNr.2017.11.038239
(Mi ufn6054)
 

This article is cited in 32 scientific papers (total in 32 papers)

INSTRUMENTS AND METHODS OF INVESTIGATION

3D printing methods for micro- and nanostructures

K. Fritzler, V. Ya. Prinz

Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk
References:
Abstract: The physical and physicochemical fundamentals of three-dimensional (3D) micro- and nanoprinting are presented. 3D printing (or additive manufacturing technology) is a process which fabricates structures and devices by depositing material (usually layer by layer) according to a 3D digital model. The methods and results reviewed here are limited to those from micro- and nanoscale fields, which are in demand in the fields of electronics, photonics, and bionics. Special attention is given to methods for fabricating sub-100-nm structures, including single- and two-photon polymerization stereolithography, electrohydrodynamic inkjet printing, and laser-induced forward transfer. The advantages and disadvantages of 3D printing methods are discussed, together with prospects for their development and application.
Funding agency Grant number
Russian Foundation for Basic Research 14-29-10261
This study was supported by RFBR grant no. 14-29-10261.
Received: June 5, 2017
Accepted: November 10, 2017
English version:
Physics–Uspekhi, 2019, Volume 62, Issue 1, Pages 54–69
DOI: https://doi.org/10.3367/UFNe.2017.11.038239
Bibliographic databases:
Document Type: Article
PACS: 32.80.Rm, 42.82.Cr, 61.46.-w, 68.65.-k, 81.20.-n
Language: Russian
Citation: K. Fritzler, V. Ya. Prinz, “3D printing methods for micro- and nanostructures”, UFN, 189:1 (2019), 55–71; Phys. Usp., 62:1 (2019), 54–69
Citation in format AMSBIB
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  • This publication is cited in the following 32 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Успехи физических наук Physics-Uspekhi
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