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Uspekhi Fizicheskikh Nauk, 2007, Volume 177, Number 7, Pages 777–780
DOI: https://doi.org/10.3367/UFNr.0177.200707h.0777 (Mi ufn488) 		 
This article is cited in 27 scientific papers (total in 27 papers)

CONFERENCES AND SYMPOSIA

Research and development in short-wave radiation sources for new-generation lithography

K. N. Kosheleva, V. E. Banineb, N. N. Salashchenkoc

a Institute of Spectroscopy, Russian Academy of Sciences
b ASML, Veldhoven, The Netherlands
c Institute for Physics of Microstructures, Russian Academy of Sciences
Full-text PDF (818 kB) Citations (27)
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DOI: https://doi.org/10.3367/UFNr.0177.200707h.0777
English version:
Physics–Uspekhi, 2007, Volume 50, Issue 7, Pages 741–744
DOI: https://doi.org/10.1070/PU2007v050n07ABEH006321
Bibliographic databases:
Document Type: Article
PACS: 42.72.-g, 42.82.Cr
Language: Russian
Citation: K. N. Koshelev, V. E. Banine, N. N. Salashchenko, “Research and development in short-wave radiation sources for new-generation lithography”, UFN, 177:7 (2007), 777–780; Phys. Usp., 50:7 (2007), 741–744
Citation in format AMSBIB
\Bibitem{KosBanSal07}
\by K.~N.~Koshelev, V.~E.~Banine, N.~N.~Salashchenko
\paper Research and development in short-wave radiation sources for new-generation lithography
\jour UFN
\yr 2007
\vol 177
\issue 7
\pages 777--780
\mathnet{http://mi.mathnet.ru/ufn488}
\crossref{https://doi.org/10.3367/UFNr.0177.200707h.0777}
\adsnasa{https://adsabs.harvard.edu/cgi-bin/bib_query?2007PhyU...50..741K}
\transl
\jour Phys. Usp.
\yr 2007
\vol 50
\issue 7
\pages 741--744
\crossref{https://doi.org/10.1070/PU2007v050n07ABEH006321}
\scopus{https://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-35948961904}
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  • https://www.mathnet.ru/eng/ufn488
  • https://www.mathnet.ru/eng/ufn/v177/i7/p777
    CONFERENCES AND SYMPOSIA
    This publication is cited in the following 27 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
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