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This article is cited in 30 scientific papers (total in 30 papers)
INSTRUMENTS AND METHODS OF INVESTIGATION
Chemical vapor deposition growth of graphene on copper substrates: current trends
I. V. Antonova Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences, Novosibirsk
Abstract:
The most interesting recent developments and trends in graphene growth technologies on copper substrates are reviewed. An analysis is given of how the substrate preparation quality and other process parameters affect the properties of films obtained at different pressures and temperatures on a copper foil and lower-thickness copper films. The fabrication methods and properties of large single-crystal graphene domains are discussed together with technologies that do not require graphene film transfer onto a dielectric substrate. Another important possible approach, that of graphene growing laterally from specially formed few-layer graphene and carbon-containing seeds or metal catalysts, is also discussed.
Received: February 14, 2013 Revised: March 2, 2013 Accepted: February 27, 2013
Citation:
I. V. Antonova, “Chemical vapor deposition growth of graphene on copper substrates: current trends”, UFN, 183:10 (2013), 1115–1122; Phys. Usp., 56:10 (2013), 1013–1020
Linking options:
https://www.mathnet.ru/eng/ufn4636 https://www.mathnet.ru/eng/ufn/v183/i10/p1115
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