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This article is cited in 108 scientific papers (total in 108 papers)
REVIEWS OF TOPICAL PROBLEMS
Magnetron plasma and nanotechnology
P. V. Kashtanova, B. M. Smirnova, R. Hipplerb a Institute for High Temperatures, Russian Academy of Sciences
b Institute of Physics, University of Greifswald
Abstract:
Magnetron plasma processes involving metal atoms and clusters are reviewed. The formation of metal atoms near the cathode and their nucleation in а buffer gas flow are discussed. The flow of а buffer gas with metal clusters through а magnetron chamber disturbs the equilibrium between the buffer gas flow and clusters near the exit orifice and is accompanied by cluster attachment to the chamber walls. Cluster charging far off the cathode, the disturbance of equilibrium between the buffer gas flow and cluster drift, and the attachment of charged clusters to the chamber walls — the factors determining the output parameters of the cluster beam escaping the magnetron chamber — are analyzed. Cluster deposition on а solid surface and on dusty plasma particles is considered.
Received: July 8, 2006 Revised: November 13, 2006
Citation:
P. V. Kashtanov, B. M. Smirnov, R. Hippler, “Magnetron plasma and nanotechnology”, UFN, 177:5 (2007), 473–510; Phys. Usp., 50:5 (2007), 455–488
Linking options:
https://www.mathnet.ru/eng/ufn461 https://www.mathnet.ru/eng/ufn/v177/i5/p473
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Abstract page: | 2573 | Full-text PDF : | 249 | References: | 60 | First page: | 1 |
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