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Uspekhi Fizicheskikh Nauk, 2007, Volume 177, Number 5, Pages 473–510
DOI: https://doi.org/10.3367/UFNr.0177.200705a.0473
(Mi ufn461)
 

This article is cited in 108 scientific papers (total in 108 papers)

REVIEWS OF TOPICAL PROBLEMS

Magnetron plasma and nanotechnology

P. V. Kashtanova, B. M. Smirnova, R. Hipplerb

a Institute for High Temperatures, Russian Academy of Sciences
b Institute of Physics, University of Greifswald
References:
Abstract: Magnetron plasma processes involving metal atoms and clusters are reviewed. The formation of metal atoms near the cathode and their nucleation in а buffer gas flow are discussed. The flow of а buffer gas with metal clusters through а magnetron chamber disturbs the equilibrium between the buffer gas flow and clusters near the exit orifice and is accompanied by cluster attachment to the chamber walls. Cluster charging far off the cathode, the disturbance of equilibrium between the buffer gas flow and cluster drift, and the attachment of charged clusters to the chamber walls — the factors determining the output parameters of the cluster beam escaping the magnetron chamber — are analyzed. Cluster deposition on а solid surface and on dusty plasma particles is considered.
Received: July 8, 2006
Revised: November 13, 2006
English version:
Physics–Uspekhi, 2007, Volume 50, Issue 5, Pages 455–488
DOI: https://doi.org/10.1070/PU2007v050n05ABEH006138
Bibliographic databases:
Document Type: Article
PACS: 36.40.-c, 52.80.Sm, 61.46.Bc
Language: Russian
Citation: P. V. Kashtanov, B. M. Smirnov, R. Hippler, “Magnetron plasma and nanotechnology”, UFN, 177:5 (2007), 473–510; Phys. Usp., 50:5 (2007), 455–488
Citation in format AMSBIB
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\paper Magnetron plasma and nanotechnology
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\issue 5
\pages 473--510
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\crossref{https://doi.org/10.3367/UFNr.0177.200705a.0473}
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\transl
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\yr 2007
\vol 50
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\crossref{https://doi.org/10.1070/PU2007v050n05ABEH006138}
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\scopus{https://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-34548594195}
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  • https://www.mathnet.ru/eng/ufn/v177/i5/p473
  • This publication is cited in the following 108 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Успехи физических наук Physics-Uspekhi
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    Abstract page:2573
    Full-text PDF :249
    References:60
    First page:1
     
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