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Uspekhi Fizicheskikh Nauk, 2013, Volume 183, Number 7, Pages 673–718
DOI: https://doi.org/10.3367/UFNr.0183.201307a.0673
(Mi ufn4398)
 

This article is cited in 88 scientific papers (total in 88 papers)

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Laser applications in nanotechnology: nanofabrication using laser ablation and laser nanolithography

G. N. Makarov

Institute of Spectroscopy, Russian Academy of Sciences
References:
Abstract: The fact that nanoparticles and nanomaterials have fundamental properties different both from their constituent atoms or molecules and from their bulk counterparts has stimulated great interest, both theoretical and practical, in nanoparticles and nanoparticle-based assemblies (functional materials), with the result that these structures have become the subject of explosive research over the last twenty years or so. A great deal of progress in this field has relied on the use of lasers. In this paper, the directions followed and results obtained in laser nanotechnology research are reviewed. The parameters, properties, and applications of nanoparticles are discussed, along with the physical and chemical methods for their fabrication and investigation. Nanofabrication applications of and fundamental physical principles behind laser ablation and laser nanolithography are discussed in detail. The applications of laser radiation are shown to range from fabricating, melting, and evaporating nanoparticles to changing their shape, structure, size, and size distribution, through studying their dynamics and forming them into periodic arrays and various structures and assemblies. The historical development of research on nanoparticles and nanomaterials and the application of laser nanotechnology in various fields are briefly reviewed.
Received: July 25, 2012
Revised: January 17, 2013
Accepted: January 22, 2013
English version:
Physics–Uspekhi, 2013, Volume 56, Issue 7, Pages 643–682
DOI: https://doi.org/10.3367/UFNe.0183.201307a.0673
Bibliographic databases:
Document Type: Article
PACS: 36.40.-c, 42.62.Fi, 61.46.-w, 81.05.ue, 81.07.-b, 81.16.-c, 81.16.Nd
Language: Russian
Citation: G. N. Makarov, “Laser applications in nanotechnology: nanofabrication using laser ablation and laser nanolithography”, UFN, 183:7 (2013), 673–718; Phys. Usp., 56:7 (2013), 643–682
Citation in format AMSBIB
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  • This publication is cited in the following 88 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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