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This article is cited in 59 scientific papers (total in 59 papers)
INSTRUMENTS AND METHODS OF INVESTIGATION
Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands
M. M. Barysheva, A. E. Pestov, N. N. Salashchenko, M. N. Toropov, N. I. Chkhalo Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod
Abstract:
Optical methods that provide high diffraction image quality with a spatial resolution of several to tens of nanometers and are in demand in such areas as projection lithography, X-ray microscopy, astrophysics, and fundamental research on the interaction of matter (vacuum) with ultrahigh ($10^{20}$–$10^{23}$ W cm$^{-2}$) electromagnetic fields are reviewed in terms of fabrication and testing technologies and possible use in the $2$–$60$ nm wavelength range. The current worldwide status of and recent achievements by the Institute for Physics of Microstructures of the Russian Academy of Sciences (RAS) in the field are discussed.
Received: June 27, 2011 Accepted: August 17, 2011
Citation:
M. M. Barysheva, A. E. Pestov, N. N. Salashchenko, M. N. Toropov, N. I. Chkhalo, “Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands”, UFN, 182:7 (2012), 727–747; Phys. Usp., 55:7 (2012), 681–699
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https://www.mathnet.ru/eng/ufn4091 https://www.mathnet.ru/eng/ufn/v182/i7/p727
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Abstract page: | 382 | Full-text PDF : | 115 | References: | 48 | First page: | 1 |
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