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Teplofizika vysokikh temperatur, 2011, Volume 49, Issue 6, Pages 803–815
(Mi tvt588)
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This article is cited in 7 scientific papers (total in 7 papers)
Plasma Investigations
3D Simulation of Electrodynamics of a Microwave Low Pressure Discharge
Yu. A. Lebedev, A. V. Tatarinov, I. L. Epshtein A. V. Topchiev Institute of Petrochemical Synthesis, Russian Academy of Sciences, Moscow
Abstract:
The structure of microwave fields in a discharge chamber used for obtaining electrode microwave
discharge is investigated. It is shown that $3D$–simulation allows quantitatively determining the optimumal structural parts of the discharge chamber for discharge generation. The represented results of self-consistent simulation of the discharge in nitrogen and hydrogen at a pressure of $1$ torr are qualitatively consistent with experimental results.
Received: 14.09.2010
Citation:
Yu. A. Lebedev, A. V. Tatarinov, I. L. Epshtein, “3D Simulation of Electrodynamics of a Microwave Low Pressure Discharge”, TVT, 49:6 (2011), 803–815; High Temperature, 49:6 (2011), 775–787
Linking options:
https://www.mathnet.ru/eng/tvt588 https://www.mathnet.ru/eng/tvt/v49/i6/p803
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Abstract page: | 239 | Full-text PDF : | 92 | References: | 49 |
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