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Teplofizika vysokikh temperatur, 2011, Volume 49, Issue 6, Pages 803–815 (Mi tvt588)  
This article is cited in 7 scientific papers (total in 7 papers)

Plasma Investigations

3D Simulation of Electrodynamics of a Microwave Low Pressure Discharge

Yu. A. Lebedev, A. V. Tatarinov, I. L. Epshtein

A. V. Topchiev Institute of Petrochemical Synthesis, Russian Academy of Sciences, Moscow
Full-text PDF (2702 kB) Citations (7)
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Abstract: The structure of microwave fields in a discharge chamber used for obtaining electrode microwave discharge is investigated. It is shown that $3D$–simulation allows quantitatively determining the optimumal structural parts of the discharge chamber for discharge generation. The represented results of self-consistent simulation of the discharge in nitrogen and hydrogen at a pressure of $1$ torr are qualitatively consistent with experimental results.
Received: 14.09.2010
English version:
High Temperature, 2011, Volume 49, Issue 6, Pages 775–787
DOI: https://doi.org/10.1134/S0018151X11060174
Bibliographic databases:
Document Type: Article
UDC: 533.9.01
Language: Russian
Citation: Yu. A. Lebedev, A. V. Tatarinov, I. L. Epshtein, “3D Simulation of Electrodynamics of a Microwave Low Pressure Discharge”, TVT, 49:6 (2011), 803–815; High Temperature, 49:6 (2011), 775–787
Citation in format AMSBIB
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    • This publication is cited in the following 7 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Teplofizika vysokikh temperatur Teplofizika vysokikh temperatur
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    References:49
     
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