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Teplofizika vysokikh temperatur, 1983, Volume 21, Issue 1, Pages 22–29 (Mi tvt5859)  
Plasma Investigations

Spectral features of a HF discharge plasma in etching aluminum

V. V. Gusev, V. M. Dolgopolov, D. I. Slovetskii, E. F. Shelykhmanov

Moscow
Full-text PDF (549 kB)
Received: 07.08.1981
Bibliographic databases:
Document Type: Article
UDC: 621.382.002
Language: Russian
Citation: V. V. Gusev, V. M. Dolgopolov, D. I. Slovetskii, E. F. Shelykhmanov, “Spectral features of a HF discharge plasma in etching aluminum”, TVT, 21:1 (1983), 22–29; High Temperature, 21:1 (1983), 19–25
Citation in format AMSBIB
\Bibitem{GusDolSlo83}
\by V.~V.~Gusev, V.~M.~Dolgopolov, D.~I.~Slovetskii, E.~F.~Shelykhmanov
\paper Spectral features of a HF discharge plasma in etching aluminum
\jour TVT
\yr 1983
\vol 21
\issue 1
\pages 22--29
\mathnet{http://mi.mathnet.ru/tvt5859}
\transl
\jour High Temperature
\yr 1983
\vol 21
\issue 1
\pages 19--25
\isi{https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=Publons&SrcAuth=Publons_CEL&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=A1983RK54800005}
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