Emission Characteristics and Plasma Parameters of Short Glow Discharge in Argon–Elegas Mixture

Results are presented of study of electrical and optical characteristics of plasma of short glow discharge in the spherical-anode–plane-cathode electrode system at an interelectrode gap of $3$ cm. Low-pressure ($p = 150$–$1500$ Pa) $\mathrm{Ar}$–$\mathrm{SF}_6$ mixtures are investigated. Optimal conditions are revealed of the discharge radiation within the argon fluoride waveband with the maximum at $193$ nm. The electron kinetic coefficients are calculated for $92 : 8$ and $99 : 1$ $\mathrm{Ar}$–$\mathrm{SF}_6$ mixtures; these mixtures are used in gas-discharge exciplex lamps.