Electrophysical parameters and composition of $\mathrm{HCl}$–$\mathrm{N}_2$ mixture plasmas

By means of mathematical modeling, data are obtained on the electron gas energy distribution function, the formation rates, and the concentrations of the neutral and the charged particles in a DC glow discharge plasma ($p=40$–$200$ Pa, $i_p=15$–$35$ mA) depending on the $\mathrm{HCl}$–$\mathrm{N}_2$ mixture composition. It is shown that a dilution of $\mathrm{HCl}$ by nitrogen is accompanied by an increase in the electron concentration in the plasma, but it does not change the intensity of the ion bombardment of the surface in contact with the plasma. The increase of the $\mathrm{HCl}$ dissociation degree in the diluted mixtures is shown to be related to an increase in the efficiency of the dissociation by the electron impact.