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Teplofizika vysokikh temperatur, 1995, Volume 33, Issue 1, Pages 163–166
(Mi tvt2896)
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This article is cited in 1 scientific paper (total in 1 paper)
Short Communications
Deposition of thin films during thermal vaporization of aluminum nitride in a vacuum
A. V. Kostanovskii, M. K. Gusev Institute for High Temperatures, Russian Academy of Sciences, Moscow
Received: 04.03.1994
Citation:
A. V. Kostanovskii, M. K. Gusev, “Deposition of thin films during thermal vaporization of aluminum nitride in a vacuum”, TVT, 33:1 (1995), 163–166; High Temperature, 33:1 (1995), 162–164
Linking options:
https://www.mathnet.ru/eng/tvt2896 https://www.mathnet.ru/eng/tvt/v33/i1/p163
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