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Teplofizika vysokikh temperatur, 1999, Volume 37, Issue 2, Pages 202–208
(Mi tvt2263)
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Plasma Investigations
Measurements of the gas temperature in a low-pressure radio-frequency discharge by the scanning calorimetry method
A. N. Magunov, O. V. Lukin, A. Yu. Gasilov Institute of Microelectronics of the Russian Academy of Sciences, Yaroslavl
Received: 20.10.1997
Citation:
A. N. Magunov, O. V. Lukin, A. Yu. Gasilov, “Measurements of the gas temperature in a low-pressure radio-frequency discharge by the scanning calorimetry method”, TVT, 37:2 (1999), 202–208; High Temperature, 37:2 (1999), 180–186
Linking options:
https://www.mathnet.ru/eng/tvt2263 https://www.mathnet.ru/eng/tvt/v37/i2/p202
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Statistics & downloads: |
Abstract page: | 106 | Full-text PDF : | 95 |
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