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This article is cited in 5 scientific papers (total in 5 papers)
Short Communications
Formation of a thin film containing $\alpha$-carbine in the magnetron sputtering of graphite targets and the impact of an external photoactivation source
A. V. Kostanovskiia, A. A. Pronkina, A. N. Kirichenkob a Joint Institute for High Temperatures, Russian Academy of Sciences, Moscow, Russia
b Technological Institute for Superhard and Novel Carbon Materials, Troitsk, Russia
Abstract:
The possibility of formation of a thin film containing $\alpha$-carbine in magnetron sputtering of graphite targets and the impact of an external photoactivation source with the spectral density of the radiation flux $\sim5\times10^8\text{W/m}^3$ at the wavelength of $300\text{ nm}$ and at the substrate temperature $\sim660\text{ K}$ is shown experimentally.
Received: 19.11.2012
Citation:
A. V. Kostanovskii, A. A. Pronkin, A. N. Kirichenko, “Formation of a thin film containing $\alpha$-carbine in the magnetron sputtering of graphite targets and the impact of an external photoactivation source”, TVT, 51:5 (2013), 787–790; High Temperature, 51:5 (2013), 712–715
Linking options:
https://www.mathnet.ru/eng/tvt141 https://www.mathnet.ru/eng/tvt/v51/i5/p787
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