An investigation of the heating of electrons in multipolar magnet systems and design of low-pressure electron-cyclotron-resonance microwave-frequency reactors

The problem is treated of sustaining plasma in low-pressure electron-cyclotron-resonance plasma reactors in which the main source of ionization is provided by fast electrons blocked in magnetic traps of multipolar magnet systems. The electron-cyclotron heating of electrons by the electric field of a microwave is analyzed. The numerical simulation of the electron motion in magnet systems of various configurations and statistical processing of the calculation results are used to simulate the high-energy part of the electron energy distribution function. It is demonstrated that the main factor defining the electron loss in magnetic traps in the collisionless limit is the departure of fast electrons from magnetic traps to the boundaries of the structure among other things. Comparison is made of different multipolar magnet systems, and the principles of designing optimal electron-cyclotron-resonance MW reactors are formulated.