Effect of plastic deformation on the heat capacity of silicon

The specific heat $c_p$ of plastically deformed silicon single crystals is measured in the temperature range of $100$–$800$ K. An increase in the $c_p$ of silicon single crystals subjected to plastic deformation as compared with the non-deformed sample is detected in the temperature range of $T > 200$ K. Based on the generally accepted pattern of plastic deformation of crystals, it can be assumed that the increase in the heat capacity is probably due to the increase in the imperfection of the crystal structure in the process of its deformation.