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Plasma Investigations
Generation of a metal porous film by arc discharge
A. V. Dyrenkov, B. M. Smirnov, D. V. Tereshonok Joint Institute for High Temperatures, Russian Academy of Sciences, Moscow
Abstract:
The copper wire vaporization method is applied to obtain porous copper film on a silicon surface. We determine the distribution of the surface clusters over the sizes and the density. The average size of the clusters at optimal conditions (at a distance of $2$ mm from the discharge) is about $0.5\,\mu$m, and the deposition density is $3$–$5$ clusters per squared $\mu$m.
Received: 03.11.2016 Accepted: 27.12.2016
Citation:
A. V. Dyrenkov, B. M. Smirnov, D. V. Tereshonok, “Generation of a metal porous film by arc discharge”, TVT, 55:6 (2017), 685–688; High Temperature, 55:6 (2017), 841–843
Linking options:
https://www.mathnet.ru/eng/tvt10772 https://www.mathnet.ru/eng/tvt/v55/i6/p685
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Statistics & downloads: |
Abstract page: | 239 | Full-text PDF : | 81 | References: | 38 | First page: | 5 |
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