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Sibirskii Zhurnal Industrial'noi Matematiki, 2014, Volume 17, Number 4, Pages 120–135 (Mi sjim865)  
This article is cited in 1 scientific paper (total in 1 paper)

Numerical study of mathematical models of MEMS resonators of different types

S. I. Fadeevab, E. G. Kostsovc, D. O. Pimanova

a Novosibirsk State University, 2 Pirogova st., 630090 Novosibirsk
b Sobolev Institute of Mathematics SB RAS, 4 Koptyug av., 630090 Novosibirsk
c Institute of Automation and Electrometry SB RAS, 1 Koptyug av., 630090 Novosibirsk
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Abstract: We present the results of a numerical study of mathematical models of MEMS resonators (microelectromechanical systems). The mathematical models of the devices are given by the statements of initial boundary value problems that describe the oscillations of the mobile electrode. Oscillations occur during the launch under the influence of the electrostatic field between the mobile and fixed electrodes in the micro gap, and then, after the launch, become free oscillations. The conditions for the appearance of oscillations of the mobile electrode are numerically determined in the form of a connection between the launch parameters and the parameters of the free oscillations.
Keywords: electrostatic attraction, method of lines, self-oscillation, free oscillation.
Received: 07.04.2014
English version:
Journal of Applied and Industrial Mathematics, 2015, Volume 9, Issue 1, Pages 47–60
DOI: https://doi.org/10.1134/S1990478915010068
Bibliographic databases:
Document Type: Article
UDC: 519.63+621.38
Language: Russian
Citation: S. I. Fadeev, E. G. Kostsov, D. O. Pimanov, “Numerical study of mathematical models of MEMS resonators of different types”, Sib. Zh. Ind. Mat., 17:4 (2014), 120–135; J. Appl. Industr. Math., 9:1 (2015), 47–60
Citation in format AMSBIB
\Bibitem{FadKosPim14}
\by S.~I.~Fadeev, E.~G.~Kostsov, D.~O.~Pimanov
\paper Numerical study of mathematical models of MEMS resonators of different types
\jour Sib. Zh. Ind. Mat.
\yr 2014
\vol 17
\issue 4
\pages 120--135
\mathnet{http://mi.mathnet.ru/sjim865}
\mathscinet{http://mathscinet.ams.org/mathscinet-getitem?mr=3364399}
\transl
\jour J. Appl. Industr. Math.
\yr 2015
\vol 9
\issue 1
\pages 47--60
\crossref{https://doi.org/10.1134/S1990478915010068}
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    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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