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Sibirskii Zhurnal Industrial'noi Matematiki, 2023, Volume 26, Number 3, Pages 169–178
DOI: https://doi.org/10.33048/SIBJIM.2023.26.313
(Mi sjim1255)
 

Algorithm for controlling the process of spraying optical coatings based on sample broadband measurement data

V. D. Shinkareva, D. V. Lukyanenkoa, A. V. Tikhonravovb, A. G. Yagolaa

a M. V. Lomonosov Moscow State University, Leninskie gory 1, build. 2, Moscow 119991, Russia
b MSU Research Computing Center, Leninskie gory 1, build. 4, Moscow 119234, Russia
References:
Abstract: An algorithm for controlling the deposition process of optical coatings based on the analysis of sample data of broadband measurements for a fixed set of wavelengths is considered. The considered algorithm uses broadband measurement data on the one hand, which is an advantage compared to using only monochromatic measurement data for one fixed wavelength, and on the other hand is fast-acting compared to algorithms using full broadband measurement data. It is demonstrated that the proposed algorithm makes it possible to obtain sufficiently accurate estimates of the thicknesses of layers of sprayed multilayer optical coatings.
Keywords: optical coatings, coating spraying, broadband control, monochromatic control.
Funding agency Grant number
Russian Science Foundation 21-11-00011
Received: 02.04.2023
Revised: 24.04.2023
Accepted: 27.04.2023
English version:
Journal of Applied and Industrial Mathematics, 2023, Volume 17, Issue 3, Pages 608–615
DOI: https://doi.org/10.1134/S1990478923030146
Document Type: Article
UDC: 519.6
Language: Russian
Citation: V. D. Shinkarev, D. V. Lukyanenko, A. V. Tikhonravov, A. G. Yagola, “Algorithm for controlling the process of spraying optical coatings based on sample broadband measurement data”, Sib. Zh. Ind. Mat., 26:3 (2023), 169–178; J. Appl. Industr. Math., 17:3 (2023), 608–615
Citation in format AMSBIB
\Bibitem{ShiLukTik23}
\by V.~D.~Shinkarev, D.~V.~Lukyanenko, A.~V.~Tikhonravov, A.~G.~Yagola
\paper Algorithm for controlling the process of spraying optical coatings based on sample broadband measurement data
\jour Sib. Zh. Ind. Mat.
\yr 2023
\vol 26
\issue 3
\pages 169--178
\mathnet{http://mi.mathnet.ru/sjim1255}
\crossref{https://doi.org/10.33048/SIBJIM.2023.26.313}
\transl
\jour J. Appl. Industr. Math.
\yr 2023
\vol 17
\issue 3
\pages 608--615
\crossref{https://doi.org/10.1134/S1990478923030146}
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    Сибирский журнал индустриальной математики
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