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Sibirskii Zhurnal Industrial'noi Matematiki, 2020, Volume 23, Number 2, Pages 93–105
DOI: https://doi.org/10.33048/SIBJIM.2020.23.207 (Mi sjim1090) 		 
This article is cited in 8 scientific papers (total in 8 papers)

Raising the accuracy of monitoring the optical coating deposition by application of a nonlocal algorithm of data analysis

I. V. Kochikova, Yu. S. Lagutinb, A. A. Lagutinab, D. V. Lukyanenkob, A. V. Tikhonravova, A. G. Yagolab

a Research Computing Center, Lomonosov Moscow State University, Leninskie gory 1, korp. 4, Moscow 119234, Russia
b Lomonosov Moscow State University, Leninskie gory 1, korp. 2, Moscow 119991, Russia
Full-text PDF (639 kB) Citations (8)
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DOI: https://doi.org/10.33048/SIBJIM.2020.23.207
Abstract: Under consideration is the inverse problem of controlling the deposition of a multilayer coating using optical monitoring. Some new nonlocal algorithm is introduced for data analysis. Using the simulation of deposition process, the errors are compared of the proposed nonlocal algorithm and the traditional local algorithm. A scheme of correction of the levels of the deposition process termination is considered which allows us to improve the accuracy of deposition monitoring. We show that the introduced nonlocal algorithm is more efficient both for the deposition without correction of the signal level for the deposition interruption and with correction of this level.
Keywords: inverse problem, analysis of experimental data, computational algorithm, thin film coating.
Funding agency Grant number
Russian Science Foundation 16–11–10219
The authors were supported by the Russian Science Foundation (project no. 16-11-10219).
Received: 13.12.2019
Revised: 03.02.2020
Accepted: 09.04.2020
English version:
Journal of Applied and Industrial Mathematics, 2020, Volume 14, Issue 2, Pages 330–339
DOI: https://doi.org/10.1134/S1990478920020118
Bibliographic databases:
Document Type: Article
UDC: 519.6
Language: Russian
Citation: I. V. Kochikov, Yu. S. Lagutin, A. A. Lagutina, D. V. Lukyanenko, A. V. Tikhonravov, A. G. Yagola, “Raising the accuracy of monitoring the optical coating deposition by application of a nonlocal algorithm of data analysis”, Sib. Zh. Ind. Mat., 23:2 (2020), 93–105; J. Appl. Industr. Math., 14:2 (2020), 330–339
Citation in format AMSBIB
\Bibitem{KocLagLag20}
\by I.~V.~Kochikov, Yu.~S.~Lagutin, A.~A.~Lagutina, D.~V.~Lukyanenko, A.~V.~Tikhonravov, A.~G.~Yagola
\paper Raising the accuracy of monitoring the optical coating deposition by application of a nonlocal algorithm of data analysis
\jour Sib. Zh. Ind. Mat.
\yr 2020
\vol 23
\issue 2
\pages 93--105
\mathnet{http://mi.mathnet.ru/sjim1090}
\crossref{https://doi.org/10.33048/SIBJIM.2020.23.207}
\elib{https://elibrary.ru/item.asp?id=45482737}
\transl
\jour J. Appl. Industr. Math.
\yr 2020
\vol 14
\issue 2
\pages 330--339
\crossref{https://doi.org/10.1134/S1990478920020118}
\scopus{https://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-85087756057}
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    • This publication is cited in the following 8 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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