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Russian Chemical Reviews, 2020, Volume 89, Issue 2, Pages 173–190
DOI: https://doi.org/10.1070/RCR4899 (Mi rcr4280) 		 
This article is cited in 49 scientific papers (total in 49 papers)

Photoacid generators. Application and current state of development

N. A. Kuznetsovaa, G. V. Malkovb, B. G. Gribovc

a State Scientific Center "Institute of Organic Intermediates and Dyes", Moscow
b Institute of Problems of Chemical Physics, Russian Academy of Sciences, Chernogolovka, Moscow region
c Molecular Electronics Research Institute, Moscow, Zelenograd
English full-text Citations (49)
DOI: https://doi.org/10.1070/RCR4899
Abstract: Photoacid generators are used as components of photocurable polymer formulations and chemically amplified photoresists in microelectronics industry. In recent years, these compounds gained importance as components of various engineering materials. The review presents the classification of photoacid generators and summarizes data on photochemical processes giving photoacids. A special section is devoted to practical applications of photoacid generators and the current state of their development.
The bibliography includes 118 references.
Received: 16.05.2019
Russian version:
Uspekhi Khimii, 2020, Volume 89, Issue 2, Pages 173–190
DOI: https://doi.org/10.1070/RCR4899
Bibliographic databases:
Document Type: Article
Language: English
Original paper language: Russian
Citation: N. A. Kuznetsova, G. V. Malkov, B. G. Gribov, “Photoacid generators. Application and current state of development”, Usp. Khim., 89:2 (2020), 173–190; Russian Chem. Reviews, 89:2 (2020), 173–190
Citation in format AMSBIB
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\paper Photoacid generators. Application and current state of development
\jour Usp. Khim.
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\pages 173--190
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  • https://doi.org/10.1070/RCR4899
  • https://www.mathnet.ru/eng/rcr/v89/i2/p173
    • This publication is cited in the following 49 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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