Kinetics and Catalysis of the Oxidation of Titanium, Silicon, Germanium, and Gallium Arsenide

A systematic account is given of the results of studies of the kinetics and catalysis of thermal gas-phase oxidation reactions of titanium, silicon, germanium, and GaAs. The influence of various factors (the nature of the reactant gas, the method of the preliminary treatment of the surface, and the nature of the substance oxidised) on the reaction kinetics has been estimated. The characteristics of the catalysis of heterogeneous oxidative processes are discussed and new ways of solving a number of practical problems are outlined.
The bibliography includes 133 references.