Abstract:
A systematic account is given of the results of studies of the kinetics and catalysis of thermal gas-phase oxidation reactions of titanium, silicon, germanium, and GaAs. The influence of various factors (the nature of the reactant gas, the method of the preliminary treatment of the surface, and the nature of the substance oxidised) on the reaction kinetics has been estimated. The characteristics of the catalysis of heterogeneous oxidative processes are discussed and new ways of solving a number of practical problems are outlined. The bibliography includes 133 references.
Bibliographic databases:
Document Type:
Article
UDC:
541.128.1
Language: English
Original paper language: Russian
Citation:
N. P. Peksheva, V. M. Strukov, “Kinetics and Catalysis of the Oxidation of Titanium, Silicon, Germanium, and Gallium Arsenide”, Usp. Khim., 48:11 (1979), 2034–2060; Russian Chem. Reviews, 48:11 (1979), 1092–1108
Linking options:
https://www.mathnet.ru/eng/rcr3178
https://doi.org/10.1070/RC1979v048n11ABEH002431
https://www.mathnet.ru/eng/rcr/v48/i11/p2034
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