Kinetics of the thermal decomposition of alkyl derivatives of Group III and V elements

The results of kinetic studies on the thermal decomposition of alkyl derivatives of Group III and V elements, used to obtain semiconducting epitaxial structures, are surveyed. Their reaction paths in the gas phase and on the surface of epitaxial layers as well as the factors influencing the mode of decomposition are analysed. The possibility of the formation of complexes between the components of the organoelement mixture during their joint pyrolysis is demonstrated. The bibliography includes 128 references.