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Russian Chemical Reviews, 1993, Volume 62, Issue 1, Pages 35–49
DOI: https://doi.org/10.1070/RC1993v062n01ABEH000004 (Mi rcr1079) 		 
This article is cited in 6 scientific papers (total in 6 papers)

Processes amplifying the effects of light on polymer layers

A. V. Vannikov, A. D. Grishina

Frumkin Institute of Electrochemistry, Russian Academy of Sciences
English full-text Citations (6)
DOI: https://doi.org/10.1070/RC1993v062n01ABEH000004
Abstract: Processes bringing about amplification of the primary photoeffect in polymer layers through complex formation, autocatalysis, autosensitisation, and acid catalysis are discussed and their practical applications are considered. Attention is concentrated on highly sensitive photoresists for the photolithographic process used in advanced technologies. The bibliography includes 114 references.
Received: 10.09.1992
Russian version:
Uspekhi Khimii, 1993, Volume 62, Issue 1, Pages 39–54
DOI: https://doi.org/10.1070/RC1993v062n01ABEH000004
Bibliographic databases:
Document Type: Article
UDC: 541.14+771.53
Language: English
Original paper language: Russian


Citation: A. V. Vannikov, A. D. Grishina, “Processes amplifying the effects of light on polymer layers”, Usp. Khim., 62:1 (1993), 39–54; Russian Chem. Reviews, 62:1 (1993), 35–49
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  • https://www.mathnet.ru/eng/rcr/v62/i1/p39
    • This publication is cited in the following 6 articles:
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