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This article is cited in 4 scientific papers (total in 4 papers)
Interaction of laser radiation with matter. Laser plasma
Surface damage of silicon and copper by pulsed and pulse-periodic action of an Nd:YAG laser
A. F. Banishev, E. A. Balykina Scientific-Research Center of Industrial Lasers, Russian Academy of Sciences, Shatura, Moscow region
Abstract:
An investigation was made of the damage to the surface of silicon and copper by pulsed and pulse-periodic action of an Nd:YAG laser. Anomalies were found in a probe Ne — He laser beam scattered by the surface of silicon when it was irradiated by a series of Nd:YAG pulses of I < Imelt intensity (Imelt is the surface melting threshold). These anomalies were attributed tentatively to the formation of a defect-saturated surface layer.
Received: 15.10.1996
Citation:
A. F. Banishev, E. A. Balykina, “Surface damage of silicon and copper by pulsed and pulse-periodic action of an Nd:YAG laser”, Kvantovaya Elektronika, 24:6 (1997), 557–559 [Quantum Electron., 27:6 (1997), 542–544]
Linking options:
https://www.mathnet.ru/eng/qe985 https://www.mathnet.ru/eng/qe/v24/i6/p557
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Abstract page: | 153 | Full-text PDF : | 101 |
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