Efficiency of excimer lasers utilizing rare-gas halide molecules excited by an electron beam

Solutions are obtained of the rate equations describing the processes in the plasma of excimer lasers utilizing rare-gas halide molecules. Formulas are obtained for estimating the efficiency of such lasers excited by an electron beam. Numerical simulation of the processes in excimer lasers shows that such formulas can be used to calculate the efficiency at gas pressures from 1 to 10 atm. The results are given of calculations of the maximum efficiency of KrF*, XeCl*, and XeBr* lasers.