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Brief Communications
Investigation of the formation of diffraction gratings on the surface of optical waveguides
A. S. Svakhin, V. A. Sychugov, G. P. Shipulo
Abstract:
A study was made of the processes of grating formation on glass by ion-beam etching through a photoresist mask. Freon (CF4) was used as the working gas. It was found that careful monitoring of the shape of the mask is necessary if gratings with a given ruling profile are desired.
Received: 29.11.1978
Citation:
A. S. Svakhin, V. A. Sychugov, G. P. Shipulo, “Investigation of the formation of diffraction gratings on the surface of optical waveguides”, Kvantovaya Elektronika, 6:5 (1979), 1095–1097 [Sov J Quantum Electron, 9:5 (1979), 645–647]
Linking options:
https://www.mathnet.ru/eng/qe9077 https://www.mathnet.ru/eng/qe/v6/i5/p1095
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Statistics & downloads: |
Abstract page: | 104 | Full-text PDF : | 55 |
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