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Kvantovaya Elektronika, 1979, Volume 6, Number 5, Pages 1095–1097 (Mi qe9077)  
Brief Communications

Investigation of the formation of diffraction gratings on the surface of optical waveguides

A. S. Svakhin, V. A. Sychugov, G. P. Shipulo
Full-text PDF (621 kB)
Abstract: A study was made of the processes of grating formation on glass by ion-beam etching through a photoresist mask. Freon (CF4) was used as the working gas. It was found that careful monitoring of the shape of the mask is necessary if gratings with a given ruling profile are desired.
Received: 29.11.1978
English version:
Soviet Journal of Quantum Electronics, 1979, Volume 9, Issue 5, Pages 645–647
DOI: https://doi.org/10.1070/QE1979v009n05ABEH009077
Document Type: Article
UDC: 621.372.8.09
PACS: 42.80.Fn, 42.80.Lt
Language: Russian


Citation: A. S. Svakhin, V. A. Sychugov, G. P. Shipulo, “Investigation of the formation of diffraction gratings on the surface of optical waveguides”, Kvantovaya Elektronika, 6:5 (1979), 1095–1097 [Sov J Quantum Electron, 9:5 (1979), 645–647]
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    		Квантовая электроника Quantum Electronics
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